단일칩 마이크로컨트롤러를 이용한 차압식 유량제어기의 개발

Development of Differential Exhaust Flow Controller using One Chip Microcontroller

In this paper, a Exhaust Flow Controller (EFC) technology for uniform application of film coater and developer device is introduced that spread and remove photo resister at semiconductor manufacturing process. Because developed EFC device uses differential pressure sensing method as a differential flow meter and embodied smart A/D conversion by using a one chip microprocessor and devised by feedback Servo control, It has shown excellent performance and stability evaluation, as maximum 2000L/min flow, capability of installation to actual semiconductor equipment.