Analysis of Trace Trichlorosilane in High Purity Silicon Tetrachloride by Near-IR Spectroscopy

근적외선 분광법을 이용한 고순도 SiCI4 중의 미량 불순물 SiHCI3의 분석

  • Park, Chan-Jo (Chemical Analysis Laboratory, Korea Research Institute of Chemical Technology) ;
  • Lee, Sueg-Geun (Chemical Analysis Laboratory, Korea Research Institute of Chemical Technology)
  • Received : 2001.10.15
  • Published : 2002.02.25

Abstract

The content of $SiHCl_3$ as a trace impurity in $SiCl_4$ was analyzed by Near IR spectrophotometer with optical fiber. The strong absorption bands of $5345{\sim}5116cm^{-1}$ and $4848{\sim}4349cm^{-1}$ were used for analysis of $SiHCl_3$, and the detection limit of impurity $SiCl_3$ was appeared to be 0.005 % in the spectrum. The quantitative analysis by Near IR spectrophotometry showed the analytical possibility of trace impurity in $SiCl_4$ without sample pre-treatment not only in the laboratory but also in the field.

Keywords

References

  1. Analytical Chemistry v.59 no.8 INFRARED SPECTROPHOTOMETRIC DETERMINATION OF HYDROGEN-CONTAINING IMPURITIES IN SILICON TETRACHLORIDE T. Y. Kometani;D. L. Wood;J. P. Luongo https://doi.org/10.1021/ac00135a005
  2. Ural. Konf. Spektrosk. (Russ). v.2 V. V. Koyolev;N. T. Shokina;T. A. Lifanova
  3. Analytical Chemistry v.53 no.12 D. L. Wood;J. P. Luongo;S. S. Debala https://doi.org/10.1021/ac00235a066
  4. Electronics Letters v.12 no.12 M. Horiguchi;H. Osanai https://doi.org/10.1049/el:19760239
  5. Electronics Letters v.12 no.21 H. Osanai;T. Shioda;T. Moriyama;S. Aroki;M. Horiguchi;T. Izawa;H. Takata https://doi.org/10.1049/el:19760418
  6. Applied Physics Letters v.21 no.5 D. B. Keck;P. C. Schultz;F. Zimer https://doi.org/10.1063/1.1654350
  7. Applied Optics v.11 no.7 D. B. Keck;A. R. Tynes https://doi.org/10.1364/AO.11.001502
  8. Analytical Chemistry v.35 no.13 M. J. Rand https://doi.org/10.1021/ac60206a043
  9. Journal of the American Ceramic Society v.62 no.11-12 D. L. Wood;T. Y. Kometani;J. P. Luongo https://doi.org/10.1111/j.1151-2916.1979.tb12758.x
  10. Spect. and Spect. Anal. v.14 no.2 X. Zhu;B. Li;Q. Zhang