JSTS:Journal of Semiconductor Technology and Science

  • 제2권1호
  • /
  • Pages.87-92
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  • 2002
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  • 1598-1657(pISSN)
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  • 2233-4866(eISSN)
대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

A Method for Measurement of Limiting Intrinsic Non-Uniformity Due to Process in CCD-Multiplexers for Focal Plane Arrays

  • 발행 : 2002.03.01
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초록

We present a simple experimental method for determination of limiting intrinsic fixed-pattern non-uniformity (NU) due to fabrication process in two-dimensional CCD multiplexers (MUXs) that are used for hybrid focal plane arrays. Here, this is done by determining separately the two NUs viz. that are $V_T$ dependent and $V_T$ independent. From these measurements, process dependent NU can be extracted. It is argued that $V_T$ dependent NU can be eliminated by designing novel input circuits whereas $V_T$ independent NU, primarily, dependent on process control and material variations may be reduced but cannot be eliminated completely and hence limits the FPA performance eventually.

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참고문헌

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