참고문헌
- J. E. Sundgren and H.T.G. Hentzell : J. Vac. Sci. Technol., A4 (1986) 2259
- T. Cselle and A. Barimani : Surf. Coat. Technol., 76-77 (1995) 712 https://doi.org/10.1016/0257-8972(96)80011-9
- S. Boelens and H. Veltrop, Surf. Coat. Technol., 33 (1987) 63 https://doi.org/10.1016/0257-8972(87)90177-0
- W. D. Munz : J. Vac. Sci. Technol., A4 (6) (1986) 2717
- N. J. M. Carvalho, A. J. Huis in't Veld and J. Th. De Hosson : Surf. Coat. Technol., 105 (1998) 109 https://doi.org/10.1016/S0257-8972(98)00466-6
- S. Ma, K. Xu and J. He : Surf. Coat. Technol., 142-144 (2001) 1023 https://doi.org/10.1016/S0257-8972(01)01188-4
- G. H. Kang, H. Uchida and E. S. Koh : Surf. Coat. Technol., 86/87 (1996) 421 https://doi.org/10.1016/S0257-8972(96)02980-5
- H. Ljungcrantz, L. Hultman and J. E. Sundgren : Surf. Coat. Technol., 63 (1994) 123 https://doi.org/10.1016/S0257-8972(05)80016-7
- Anthony J. Perry, James R. Treglio, Albert F. Tian : Surf. Coat. Technol., 76-77 (1995) 815 https://doi.org/10.1016/0257-8972(95)02628-2
- M. Sakaki and T. Sakakibara : IEEE Trans. Plasma Sci., 22 (1994) 1049 https://doi.org/10.1109/27.370251
- A. N. Panckow, J. Steffenhagen, B. Wegner, L. Dubner and F. Lierath : Surf. Coat. TechnoL, 138 (2001) 71 https://doi.org/10.1016/S0257-8972(00)01150-6
- M. I. Jones, I. R. McColl and D. M. Grant : Surf. Coat. Technol., 132 (2000) 143 https://doi.org/10.1016/S0257-8972(00)00867-7
- M. Pinkas, J. Pelleg and M. P. Dariel : Thin Solid Films, 355-356 (1999) 380 https://doi.org/10.1016/S0040-6090(99)00667-7
- U. C. Oh amd J. H. Je : J. Appl. Phys., 3 (1) (1993) 16
- W. Heinke, A. Leyland, A. Mattews, G. Berg. c. Friedrich, E. Broszeit and Evaluation Tests : Thin Solid Films, 270 (1995) 431-438 https://doi.org/10.1016/0040-6090(95)06934-8