The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of an Electromagnetic Micropump for Cerebrospinal Fluid Shunt

뇌척수액 션트를 위한 마이크로 전자력 펌프의 제작

  • Published : 2002.12.01
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Abstract

This paper Presents the fabrication and test of a micropump that can be applied to an implantable cerebrospinal fluid shunt system for hydrocephalus patients The proposed micropump consists of a pair of corrugated parylene diaphragm chambers and a set of nozzle and diffuser. The electromagnetic force drives the diaphragms and pumps the fluid. The static or dynamic characteristics of the fabricated devices have been obtained experimentally. The site of the micropump is $14 \times 12 \times 8mm^3$. The flow rate increase by about $3 mell/h$ was observed in the operational pressure range the micropump.

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References

  1. H. G. Jeong, O. C. Jeong, S. Yang, 'Fabrication of electromagnetic microactuator with an electroplated coil on a parylene diaphragm,' Proc. of SPIE's 7th International Symposium on Smart Structures and Materials, Vol. 3990, pp. 272-280, 2000. 3.
  2. K. H. Kim, S. S. Yang, 'Fabrication and Test of an Electromagnetic Micro Actuator with a Planar Coil on a Parylene Diaphragm,' The 2000 ASME IMECE, Orlando, U.S.A., MEMS-Vol.2, pp. 281 286, 2000. 11
  3. Anders Olsson, C, 'Valve-Less Diffuser Micropumps Fabricated using Thermoplastic Replication' Proceeding IEEE International Conference on Micro Electro Mechanical Systems, Vol. 39, pp. 517 - 521, 1990 https://doi.org/10.1016/S0924-4247(98)80059-9