R.F 마그네트론 스퍼트링으로 작성된 $TiO_2$박막의 $NO_x$ 감지 특성

$NO_x$ Sensing Characteristic of $TiO_2$ Thin Film Deposited by R.F Magnetron Sputtering

  • 발행 : 2002.12.01

초록

In these days, diesel vehicle or power plant emits $NO_X\; and SO_2$ which cause air pollution like acid-rain, ozone layer destroy and optical smoke, therefore there are many kinds of methods considered for removing them such as SCR, catalyst, plasma process, and plasma-catalyst hybrid process. T$TiO_2$ is commonly used as catalyst to remove $NO_X$ gas because it have very excellent chemical characteristic as photo catalyst. In this paper, $NO_X$ sensing characteristic of $TiO_2$ thin film deposited by R.F Magnetron sputtering is investigated. A finger shaped electrode on $Al_2$O$_3$ substrate is designed and $TiO_2$ is deposited on the electrode by the magnetron sputtering deposition system. Chemical composition of the deposited $TiO_2$ thin film is $TiO_{1.9}$ by RBS analysis. When the UV is irradiated on it with flowing air, capacitance of $TiO_2$ thin film increases, however, when NO gas is put into the system with air, it immediately decreases because of photo chemical reaction. and it monotonously decreases with increasing NO concentration.

키워드

참고문헌

  1. Kwang Sik Yun, 'Daytime and Nighttime Photochemical reactions of the Pure Oxygen System', Journal of the Korean Chemical Society, Vol. 13, No. 4, pp. 249-261, 1969
  2. J. K. Park and others 'Synthesis of $TiO_2$ Powders by the Hydrolysis of Titanium n-Bbutoxide and Reaction Mechanism', Journal of the Korean Chemical Society, Vol. 43, No. 5, pp. 505-510, 1999
  3. M. D. Wiggins, M. C. Nelson, and C. R. Aita, 'Phase development in sputter deposited titanium dioxide
  4. Hyunku Joo, Myung Seok Jeon, and Tai Kyu Lee, 'Photocatalysts Theory and Its Application', Journal of Korean Society of Environmental Engineers, Vol. 21, No. 6, pp. 1231-1240, 1999
  5. Gun-Dae Lee et al., 'Degradation of Nitrophenol over TiO2 photocatalyst'Journal of Korean Society of Environmental Engineers, Vol. 20, No. 11, pp. 1599-1610, 1998
  6. Hee-Dong Chun, 'Advanced Oxidation Process with $TiO_2$ Photocatalyst', Journal of Korean Society of Environmental Engineers, Vol. 16, No. 7, pp. 809-818, 1994
  7. Joon-Wun Kang, Hoon-Soo Park, and Kwang-Ho Choei, 'Photocatalytic Degradation of Organic Pollutants over a $TiO_2$ Semiconductor', Journal of Korean Society of Environmental Engineers, Vol. 17, No. 3, pp. 283-294, 1995
  8. Tai K.Lee, Dong H. Kim, Kyung N. Kim, and P.Chungmoo Auh, 'Heterogeneous Photocatalytic Decomposition of Organics in Water Phase', solar energy, Vol. 15, No. 2, pp. 65-75, 1995
  9. Young-sun Choi, O-bong Yang, and Yong-seob Jeong 'De-coloring of Fabrication of $TiO_2-V_2O_5-Nb_2O_5$ Humidity sensors and the characteristics', the applied chemistry, Vol. 4, No. 1, pp. 141 144, 2000
  10. J-H Kim, S H Lee, 'Decolonization of Disperse Dyestuffs using UV Energy and $TiO_2$ Power' Journal of Korean Society of Environmental Engineers, Vol. 21, No. 7, pp. 1315 1322, 1999
  11. Hyun Ha Kim, 'Application of Non thermal plasma in Environmental Protection
  12. Jong Taek Kim et al., 'Fabrication and characteristics of Humidity Sensing Device using $TiO_2$ Sol' KIEE, Vol.4, No. 2, pp. 82- 86, 2000
  13. KIEE v.4 no.2 Fabrication and characteristics of Humidity Sensing Device using$TiO_2$Sol Jong Taek Kim(et al.)