Journal of the Korea Society for Simulation (한국시뮬레이션학회논문지)

The Korea Society for Simulation (한국시뮬레이션학회)
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Conveyor Capability Simulation for Semiconductor Diffusion Area

반도체 확산공정에서의 컨베이어 적정속도와 길이를 구하는 시뮬레이션

  • 박일석 (성균관대학교 정보통신공학부) ;
  • 이칠기 (성균관대학교 정보통신공학부)
  • Published : 2002.09.01
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Abstract

Semiconductor wafer fabrication is a business of high capital investment and fast changing nature. To be competitive, the production in a fab needs to be effectively planned and scheduled starting from the ramping up phase, so that the business goals such as on-time delivery, high output volume and effective use of capital intensive equipment can be achieved. Project executed that use conveyor in bay semiconductor A line. But conveyor capability is lacking and rundown happened in equipment. Do design without normal simulation and conveyor system failed. The comparison is peformed through simulation using .AutoMod a window 98 based discrete system simulation software, as a tool for comparing performance of proposed layouts. In this research estimate optimum conveyor capability, there is the purpose.

Keywords

References

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