Journal of Korean Vacuum Science & Technology
- Volume 6 Issue 1
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- Pages.22-29
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- 2002
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- 1226-6167(pISSN)
Multi-scale Simulation of Energetic Deposition: From MD Simulation to KMC Simulation
- Zhang, Qing-Yu (State Key Laboratory for Materials Modification by Laser, Ion and electron Beams, Dalian University of Technology)
- Published : 2002.06.01
Abstract
The process of energetic deposition has been simulated by using molecular dynamics (W) simulation and kinetic Monte Carlo (KMC) simulation. The atomistic mechanisms of film growth in energetic deposition are discussed.
Keywords