DOI QR코드

DOI QR Code

희박기체 상태의 라디오미터릭 효과에 의해 구동되는 선형 마이크로 액추에이터의 성능해석

Performance Analysis of a Linear Micro-actuator Operated by Radiometric Phenomena in Rarefied Gas Flow Field

  • 황영규 (성균관대학교 기계공학부) ;
  • 허중식 (성균관대학교 기계공학부)
  • 발행 : 2002.10.01

초록

The performance of micro-actuators utilizing radiometric forces are studied numerically. The Knudsen number based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo(DSMC) calculations have been performed to estimate the performance of the micro-actuators. In the present DSMC method, the variable hard sphere molecular model and no time counter technique are used to simulate the molecular collision kinetics. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies.

키워드

참고문헌

  1. Ho, C. M. and Tai, Y. C., 1996, 'REVIEW: MEMS and Its Applications for Flow Control,' J. Fluids Eng., Vol. 118, 437-447 https://doi.org/10.1115/1.2817778
  2. Kennard, E. H., 1938, Kinetic Theory of Gases, McGraw-Hill
  3. Wadsworth, D. C. and Muntz, E. P., 1996, 'A Computational Study of Radiometric Phenomena for Powering Microactuators with Unlimited Displace- ments and Large Available Forces,' J. Microelectro- mechanical Syst., Vol. 5, No. 1, pp. 59-65 https://doi.org/10.1109/84.485217
  4. Wadsworth, D. C., Muntz, E. P., Pham-Van-Diep, G. and Keeley, P., 1994, 'Crookes' Radiometer and Micromechanical Actuators,' Proc. 19th Int. Symp. on Rarefied Gas Dynamics, Oxford, pp. 708-714
  5. Ota, M. and Kawata, N., 1994, 'Direct Simulation of Gas Flows around Rarefied Gas Dynamics Engines for a Micro-Machine,' Proc. 19th Int. Symp. on Rarefied Gas Dynamics, Oxford, pp. 722-728
  6. Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford
  7. Borgnakke, C. and Larsen, P. S., 1975, 'Statistical Collision Model for Monte Carlo Simulation of Polyatomic Gas Mixture,' J. Comput. Phys., Vol. 18, pp. 405-420 https://doi.org/10.1016/0021-9991(75)90094-7