Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Tribological Behavior of DLC Coatings at Various Humidities

습도에 따른 DLC 코팅의 마찰 거동

  • 조경만 (한국과학기술연구원 트라이볼로지 연구센터, 연세대학교 대학원 기계공학과) ;
  • 안효석 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 김대은
  • Published : 2002.09.01
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Abstract

Although DLC coatings have good tribological properties, these are dependant on the deposition method, the property of contact surface, and test condition. Humidity, which has little influence on tribological behavior in macro scale, is an important factor of tribological behavior in small devices like MEMS. The objective of this study is to investigate the tribological behavior of DLC coatings with particular attention to their wettability at various humidities. DLC coatings were deposited on Si substrates and tested using a reciprocating friction tester against Si$_3$N$_4$balls at various humidities. The results showed that the tribological behavior of DLC coatings was dependant on relative humidity and wettablility of DLC coatings. Friction coefficient at high relative humidity was higher thar that at low relative humidity. The tungsten-containing DLC coatings had a good wear resistance at low relative humidity whereas DLC coatings derived from argon(Ar)+cesium(Cs) gases showed a good wear resistance at high relative humidity.

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