대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

유체의 정확한 온도 측정을 위하여 내부 센서를 집적한 마이크로채널 제작

Fabrication of the Microchannel Integrated with the Inner Sensors for Accurate Measuring Fluid Temperature

  • 발행 : 2002.09.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A rectangular straight microchannel, integrated with the resistance temperature detectors(RTDs) for temperature sensing and a micro-heater for generating the Temperature gradient along the channel, was fabricated. Its dimension is 57${\mu}{\textrm}{m}$(H)$\times$200${\mu}{\textrm}{m}$(W)$\times$48,050${\mu}{\textrm}{m}$(L), and RTDs were placed at the inner-channel wall. Si wafer was used as a substrate. For the fabrication of RTDs, 5300$\AA$ thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, the glass wafer was bonded with Si wafer by anodic bonding, so that the RTDs are located inside the microchannel. Temperature coefficient of resistance(TCR) values of the fabricated Pt-RTDs were 2800~2950ppm$^{\circ}C$ and the variation of TCR value In the range of O~10$0^{\circ}C$ was less than 0.3％. Therefore, it was proved that the fabricated Pt-RTDs without annealing were excellent as temperature sensors. The temperature distribution in the microchannel was investigated as a function of mass flow rate and heating power. The temperature increase rate diminished with decreasing the applied power and increasing the mass flow rate. It was confirmed from the comparison with the simulation results that the temperature measured inside the microchannel is more accurate than measuring the temperature measured at the outer wall. The proposed temperature sensing method and microchannel are expected to be useful in microfluidics researches.

키워드

참고문헌

  1. A. van den Berg, T. S.J. Lammerink, V. Spiering, W. Olthuis, 'Modular concept for miniature chemical systems,' DECHEMA Monographien, Vol. 132, pp. 109-124, 1996
  2. D. B. Tuckerman and R. F. W. Pease, 'High Performance Heat Sinking for VLSI,' IEEE Electron Device Letters, Vol.EDL-2, No.5, pp.126-129, 1981 https://doi.org/10.1109/EDL.1981.25367
  3. Muhammad Mustafizur Rahman, 'Measurements of heat transfer in microchannel heat sinks,' Int. Comm. Heat Mass Transfer, Vol.27, No.4, pp. 495-506, 2000 https://doi.org/10.1016/S0735-1933(00)00132-9
  4. X. F. Peng, H. Y. Hu, and B. X. Wang, 'Flow boiling through V-shape microchannels,' Experimental Heat Transfer, Vol.11, pp. 87-100, 1998 https://doi.org/10.1080/08916159808946555
  5. L. Jiang, M. Wong, and Y. Zohar, 'Phase change in microchannel heat sinks with integrated temperature sensors,' Journal of MEMS, Vol.8, No.4, pp. 358-365, 1999 https://doi.org/10.1109/84.809049
  6. A. I.K. Lao, T. M.H. Lee, I-M. Hsing, and N. Y. Ip, 'Precise temperature control of microfluidic chamber for gas and liquid phase reactions,' Sensors and Actuators, 84, pp. 11-17, 2000 https://doi.org/10.1016/S0924-4247(99)00356-8
  7. Y. P. Peles, L. P. Yarin, and G. Hetstoni, 'Steady and unsteady flow in a heated capillary,' Int. J. Multiphase flow, 27, pp. 577-598, 2001 https://doi.org/10.1016/S0301-9322(00)00041-0
  8. Benedikt Grass et al., 'A new PMMA-mirochip device for isotachophoresis with integrated conductivity detector,' Sensors and Actuators B, pp. 1-10, 2000
  9. H. Becker and Ulf Heim, 'Hot embossing as a method for the fabrication of polymer high aspect ratio structures,' Sensors and Actuators, 83, pp. 130-135, 2000 https://doi.org/10.1016/S0924-4247(00)00296-X
  10. R. G. Irvine, 'Operational Amplifier Characteristics and Applications,' 3rd ed., Prentice Hall. Inc., pp. 89-90, 1994
  11. G. T. A. Kovacs, 'Micromachined Transducers Sourcebook,' WCB/McGraw-Hill, pp. 560-561, 1998