Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Structural and optical properties of TiO2 thin films prepared by Sol-Gel dip coating method

졸-겔 침지코팅법으로 제조된 TiO2 박막의 구조적.광학적 특설

  • 김동진 (울산대학교 수학 및 물리기술학부) ;
  • 이학준 (울산대학교 수학 및 물리기술학부) ;
  • 한성홍 (울산대학교 수학 및 물리기술학부) ;
  • 김의정 (울산대학교 청정기술화학공학부)
  • Received : 2001.12.10
  • Published : 2002.06.01
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Abstract

The TiO$_2$ coating solutions were synthesized with different concentrations (T1-0.7N, T2-2.0N) of hydrochloric acid used as catalyst. and TiO$_2$ thin films were prepared by sol-gel dip coating. Their structural and optical properties were examined as a function of calcination temperature. XRD results showed that T1 thin films calcined at 400~80$0^{\circ}C$ had the anatase phase, while those calcined at 100$0^{\circ}C$ had the rutile phase. T2 thin films calcined at 40$0^{\circ}C$ and $600^{\circ}C$ had the anatase phase, with the rutile phase for calcination at 80$0^{\circ}C$. Crystallinity of T2 thin films was superior to that of T1 thin films. The crystallite size of TiO$_2$ thin films increased with increasing calcination temperature, and the crystallite size of anatase phase in T2 thin films was larger than that in T1 thin films, but the crystallite size of rutile phase in T2 thin films was smaller. The surface morphology of the films showed that the films were formed more densely in the rutile phase than in the anatase phase, this phenomenon appeared conspicuously in T2 thin films. The transmittance of the samples with thin films on quartz glass calcined at 100$0^{\circ}C$ was significantly reduced at wavelength range about 300-700 nm due to the increased absorption originating from the change of crystallite phase and composition of the films and the scattering effect originating from increasing crystallite size. The refractive index of TiO$_2$ thin films increased, and hence the film thickness as well as the porosity of TiO$_2$ thin films decreased with increasing calcination temperature. Furthermore, the refractive index of T2 thin films was higher than T1 thin films, and porosity of T2 films was lower.

촉매로 사용한 HCl 농도를 달리하여 TiO$_2$ 졸(T1-0.7N, T2-2.ON)을 제조하고, 졸-겔 침지코팅법을 이용하여 TiO$_2$ 박막을 제작하였으며, 각 박막의 열처리 온도에 따른 박막의 구조적 및 광학적 특성을 측정.분석하였다. X-선 회절분석 결과 T1박막의 경우, 400-80$0^{\circ}C$의 열처리 온도에서는 아나타제 결정상을 나타내었고, 100$0^{\circ}C$에서는 루타일 결정상을 나타내었다. T2 박막의 경우, 루타일 결정상이 보다 낮은 열처리 온도인 80$0^{\circ}C$에서 나타났다. 그리고 박막의 결정성은 T2 박막이 T1 박막보다 우수하였다. 열처리 온도가 증가함에 따라 박막의 결정 크기는 증가하였으며, T2 박막의 경우 아나타제 결정의 크기는 T1 박막보다 크며 루타일 결정의 크기는 작은 것으로 측정되었다. 박막의 표면 상태는 루타일 결정상을 지닌 박막이 아나타제 결정상을 지닌 박막보다 치밀하게 형성되어졌고, 이러한 현상은 T2박막에서 보다 뚜렷하게 나타났다. 100$0^{\circ}C$에서 열처리한 박막은 300~700nm의 파장영역에서 결정상 전이에 의한 밴드갭 에너지의 변화와 박막의 조성변화로 인한 흡수의 발생, 그리고 입자의 크기 증가에 의한 산란효과로 투과율의 감소를 초래하였다. 제조된 박막의 굴절률은 열처리 온도가 증가할수록 증가하였으며, 두께와 porosity는 감소하였다. 또한 T2 박막의 굴절률은 T1 박막보다 높았고, porosity는 낮았다.

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