A High-Resolution Heterodyne Interferometer using Beat Frequency between Two-Axial Modes of a HeNe Laser

2-종모드 레이저를 이용한 고분해능 헤테로다인 간섭계

  • Kim, Min-Seok (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Seung-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 김민석 (한국과학기술원 기계공학과) ;
  • 김승우 (한국과학기술원 기계공학과)
  • Published : 2002.04.01

Abstract

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600~1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with ainus to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial made laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, which allows us to perform multiple measurements of up to 10 machine axes simultaneously.

Keywords

References

  1. 엄태봉 등, '레이저 간섭계와 미터표준,' 정밀공학회지, 제 17 권, 제 6 호, pp. 17-24, 2000
  2. Frank C Demarest, 'High-resolution, high speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,' Meas. Sci. Tech., Vol. 9, pp. 1024-1030, 1998 https://doi.org/10.1088/0957-0233/9/7/003
  3. Yi. Xie and Yi-zun Wu, 'Zeeman laser interferometer errors for high-precision measurements,' Appl. Opt. Vol. 31, pp. 881-884, 1992 https://doi.org/10.1364/AO.31.000881
  4. K. Seta and T. O'ishi, 'Distance meter utilizing the interbeat of a He-Ne laser,' Appl. Opt. Vol. 29, pp. 1525-1528, 1989
  5. T. Araki, S. Yokoyama, and N. Suzuki, 'Simple optical distance meter using an intermode-beat modulation of a He-Ne laser and an electrical-heterodyne technique,' Rev. Sci. Instrum. Vol. 65, pp. 1883-1888, 1994 https://doi.org/10.1063/1.1144837
  6. S.C. Bartlett, F. Farahi, and D.A. Jackson, 'A dual resolution noncontact vibration and displacement sensor based upon a two wavelength source,' Rev. Sci. Instrum. Vol. 61, pp. 1014-1017, 1990 https://doi.org/10.1063/1.1141469
  7. R. Balhorn, F. Lebowsky, and D. Ullrich, 'Beat frequency between two axial modes of a He-Ne laser with internal mirrors and its dependence on cavity Q,' Appl. Opt. Vol. 14, pp. 2955-2959, 1975 https://doi.org/10.1364/AO.14.002955
  8. S. Yokoyama, T. Araki, and N. Suzuki, 'Intermode beat stabilized laser with frequency pulling,' Appl. Opt. Vol. 33, pp. 358-363, 1994 https://doi.org/10.1364/AO.33.000358
  9. 김민석, 김승우, '맥놀이 주파수 변화를 이용한 2 모드 HeNe 레이저의 안정화,' in preparation