Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A High-Resolution Heterodyne Interferometer using Beat Frequency between Two-Axial Modes of a HeNe Laser

2-종모드 레이저를 이용한 고분해능 헤테로다인 간섭계

  • Kim, Min-Seok (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Seung-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 김민석 (한국과학기술원 기계공학과) ;
  • 김승우 (한국과학기술원 기계공학과)
  • Published : 2002.04.01
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Abstract

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600~1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with ainus to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial made laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, which allows us to perform multiple measurements of up to 10 machine axes simultaneously.

Keywords

References

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