대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

마이크로몰딩의 이형성 향상을 위한 소수성 Self-assembled Monolayer(SAM) 코팅

Hydrophobic Self-assembled Monolayer(SAM) Coating for Enhanced Demolding Performance in Micromolding

  • 발행 : 2002.04.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, the surface modification effect of self-assembled monolayer(SAM) of 1-dodecanethiol [$CH_3$($CH_2$)$_{11}$SH] used as an anti-adhesive film in micromolding process was studied. Monolayers of 1-dodecanethiol[$CH_3$(CH$_2$)$_{11}$SH] were obtained by immersing a metal place in pure 1-dodecanethiol. SAM film on the nickel plate has been examined by using X-ray photoelectron spectroscopy(XPS). The focus has been placed on S-Ni bonding. From the XPS analysis, sulfur atoms were detected from the SAM film as a chemical composition of S-Ni. In order to measure an adhesion force of the SAM-coated nickel surface, atomic force microscopy(AFM) was used in force-distance mode, which whows the micro-adhesive force on solid surface. It was shown that adhesion forces measured from the SAM-coated nickel surface and the Ni surface without SAM coating were 3.52nN and 5.32nN, respectively. In order to investigate the effect of SAM coating on the surface foughness the replica in demolding process, hot embossing experiments were performed using a SAM-coated nickel master and a nickel master without SAM coating. Surface roughness of replica from the SAM-coated master showed 25nm and that of replica from master without SAM coating was 35nm. The smoother surface roughness of the replica from the SAM-coated, master is believed to result from reduction in the adhesion forces.ces.

키워드

참고문헌

  1. S.-Y. Kook, J. M. Snodgrass, A. Kirtikar, R. H. Dauskardt, 'Adhesion and Reliability of Polymer/Inorganic interface,' The Journal of Electronic Packaging, Transaction of the ASME, Vol. 120, pp. 328-335, 1998 https://doi.org/10.1115/1.2792642
  2. P. Groning., A. Schneuwly, L. Schlapbach, ''Self-Thickness-Limited' Plasma Polymerization of an ultrathin antiadhesive Film,' J. Vac. Sci. & Technol., A. 14(6), pp. 3043-3048, Nov/Dec 1996
  3. R. W. Jaszewski, H. Schift, P. Groning and G. Margaritondo, 'Prorperties of thin anti-adhesive films used for the replication of microstructures in polymers,' Microelectronic Engineering 35, pp. 381-384, 1997 https://doi.org/10.1016/S0167-9317(96)00203-1
  4. R. W. Jaszewski, H. Schift, B. Schnyder, A. Schneuwly and P. Groning, 'The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing,' Applied Surface Science, Vol. 143, pp. 301-308, 1999 https://doi.org/10.1016/S0169-4332(99)00014-8
  5. Z. Mekhalif, J. Riga, J.-J. Pireaux and J. Delhalle, 'Self-assembled monolayers of n-Dedecanethiol on electrochemically modified polycrystalline Nickel surfaces,' Langmuir, Vol. 13, pp. 2285-2290, 1997 https://doi.org/10.1021/la960528a
  6. Uthara Srinivasan, Michael R. Houston, Roger T. Howe and Roya Maboudian, 'Self-assembled fluorocarbon films for enhanced stiction reduction,' Transducers'97, pp. 1399-1402, 1997 https://doi.org/10.1109/SENSOR.1997.635499
  7. R. G. Nuzzo and D. L. Allara, J. Am. Chem. Soc., Vol. 105, pp. 4481, 1983 https://doi.org/10.1021/ja00351a063
  8. M. D. Porter, T. B. Bright, D. L. Allara and C. E. D. Chidsey, J. Am. Chem. Soc., Vol. 109, page 3559, 1987 https://doi.org/10.1021/ja00246a011
  9. Takao Ishida, Masahiko Hara, Isao Kojima, Satoshi Tsuneda, Naoki Nishida, Hiroyuki Sasabe and Wolfgang Knoll, 'High resolution X-ray photoelectron spectroscopy measurements of Octadecanethiol self-assembled monolayers on Au(111),' Langmuir, Vol. 14, pp. 2092-2096, 1998 https://doi.org/10.1021/la971104z
  10. Q. Quyang, K. Ishida and K. Okada, 'Investigation of micro-adhesion by atomic force microscopy,' Applied Surface Science, Vol. 169-170, pp. 644-648, 2001 https://doi.org/10.1016/S0169-4332(00)00804-7
  11. Eui-Sung Yoon, Ji Hyun Park, Seung Ho Yang, Hung-Gu Han and Hosung Kong, 'An Experimental study on the micro-adhesion of Octadecyltrichlorosilane SAM on Si surface,' Proc. 1st Intelligent Microsystem Symposium, pp. 157-161, 2001
  12. 박상하, 박정호, 문성욱, 박종오, 'Micromolding 기술의 성능 향상을 위한 소수성 SAM coating,' 대한 전기학회 하계학술대회 논문집, pp. 1887-1889, 2001
  13. H. Becker and C. Gartner, 'Polymer microfabrication methods for microfluidic analytical applications,' Electrophoresis, Vol. 21, pp. 12-26, 2000 https://doi.org/10.1002/(SICI)1522-2683(20000101)21:1<12::AID-ELPS12>3.0.CO;2-7