광학 소자에서의 마리크로 액추에이터 개발 현황 및 응용

References

1. Optical Engineering v.33 no.11 Micro-opto-electro-mechanical systems M.E.Motamedi
2. Laser Focus World Intergrated devices make an optical bench on a chip Ming C.Wu;L.Y.Lin;S.S.Lee;C.R.King
3. Proceedings of MOEMS97 High-Resolution Silicon Surface Micromachined Displays Olav Solgaard
4. Proceedings of MOEMS97 Surface Micromachining for Microphotonics Richard S.Muller
5. Proceedings of MOEMS99 Intergration of a micro lens on a 2-DOF-in -plane positioning actuator Che-Heung Kim;Yong-Kweon Kim
6. IEEE International Conference on MEMS MEMS Fabrication of High Aspect Ratio Track-Following Micro Actuator for Hard Disk Drive Using Silicon on Insulator Bong-Hwan Kim(et al.)
7. 2000년도 대한전기학회 하계학술대회 논문집 광기록 장치의 픽업헤드용 2.4mm 크기의 미러의 제작과 실험 박근우;김용권
8. Technical Digdst of the 16th Sensor Symposium Electrostatic Torsion Mirror M.Sekimura(et al.)
9. IEEE MEMS Workshop 2000 Damping of Micro Electrostatic Torsion Mirror Caused by Air-film Viscosity Norio Uchida;Kiyotaka Uchimaru;Minoru Yon ezawa;Masayuki Sekimura
10. IEEE MEMS Workshop 1998 Annular Shutter Mirror for a Digital Video Disk Pick-up Module J.U.Bu;J.D.Hwang;J.B.Lee;G.Kim;K.Y.Yang;S.Noh
11. IEEE MEMS Worshop 2000 PZT Actuated Micromirror for Nano-Tracking of Laser Beam for High-Density Optical Data Storage Youngjoo Yee;Hyo-Jin Nam;See-Hyoung Lee;Jong Uk Bu.;Young-Sam Jeon;Seong-Moon Cho
12. Journal of MEMS v.6 no.3 Magnetically Actyated Addressable Mictostructures Jack W.Judy;Richard S.Muller
13. Optical Engineering v.36 no.5 Mictomachined Electromagnetic Scanning Mirrors Raanan A.Miller;Yu-Chong Tai
14. International Electron Devices Technical Digest Current Status of Digital Micromirror Device(DMD)for Projection Television Applications L.J.Hornbeck
15. Sensors and Actuators A 66 Design and Fabrication of Micromirror Array Supported by Vertical Springs Jong-Woo Shin;Seok-Whan Chung;Yong-Kweon Kim;Bum Kyoo Choi
16. IEEE Jour. of Selected Topics in Quantum Electronics v.5 no.1 Free-Space Micromachined Optical Switches for Optical Networking L.Y.Lin(et al.)
17. 대한전기학회 논문지 v.49C no.2 표면 미세 가동 기술을 이용한 상하운동 및 회전운동을 하는 광 변조기에 관한 연구 정석환;김용권
18. 서울대학교 박사학위 학위논문 위상 및 방향 변조를 위한 초소형 광 변호기에 관한 연구 정석환