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초정밀 측정/가공 장비의 외부진동에 대한 상대변위의 추출과 진동성능 평가에 관한 연구

A Study on the Vibrational Reduction Evaluation and the Relative Displacement in the External Vibration of Precision Measuring System

  • 전종균 (선문대학교 기계 및 제어공학부) ;
  • 엄호성 (선문대학교 기계 및 제어공학부) ;
  • 김강부 ;
  • 원영재 (금오공과대학교 대학원 LG-건설 LCD P3)
  • 발행 : 2002.01.01

초록

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

키워드

참고문헌

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