한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제19권1호
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  • Pages.33-42
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  • 2002
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

나노트라이볼로지 - 초정밀 미세시스템에의 응용과 전망

Nanotribology - Prospects and Applications in Ultra-precision Micro-systems

  • 김대은 (연세대학교 기계전자공학부) ;
  • 성인하 (연세대학교 기계공학과 대학원) ;
  • 정구현 (연세대학교 기계공학과 대학원)
  • Kim, Dae-Eun (Dept.of Mechanical Electronics Engineering, Yonsei University) ;
  • Sung, In-Ha (Dept.of Mechanical Engineering, Graduate School of Yonsei University) ;
  • Chung, Koo-Hyun (Dept.of Mechanical Engineering, Graduate School of Yonsei University)
  • 발행 : 2002.01.01
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초록

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참고문헌

  1. Dake, L. S., Russell, J. A., and Debrodt, D.C., 'A Review of DOE ECT Tribology Surveys,' J. Tribol. -T. ASME, Vol. 108, pp. 497-501, 1986 https://doi.org/10.1115/1.3261252
  2. Komvopoulos, K., 'Surface Engineering and Microtribology for Microelectromechanical Systems,' Wear, Vol. 200, pp. 305-327, 1996 https://doi.org/10.1016/S0043-1648(96)07328-0
  3. Maboudian, R., 'Surface Processes in MEMS Technology,' Surf. Sci. Rep., Vol. 30, pp. 207-269, 1998 https://doi.org/10.1016/S0167-5729(97)00014-9
  4. Bhushan, B., 'Nanoscale Tribophysics and Tribomechanics,' Wear, Vol. 225, pp. 465-492, 1999 https://doi.org/10.1016/S0043-1648(99)00018-6
  5. Kaneko, R., Miyamoto, T., Ando, Y., and Hamada, E., 'Microwear,' Thin Solid Films, Vol. 273, pp. 105-111, 1996 https://doi.org/10.1016/0040-6090(95)06801-5
  6. Robbins, M. O., Smith, E. D., 'Connecting Molecular-scale and Macroscopic Tribology,' Langmuir, Vol. 12, pp. 4543-4547, 1996 https://doi.org/10.1021/la9505576
  7. Hwang, D. H., Sung, I. H., Kim, D. E., and Lee, S. J., 'Effects of Material Pair Properties on the Frictional Behavior of Metals,' Wear, Vol. 225, pp. 600-614, 1999 https://doi.org/10.1016/S0043-1648(98)00383-4
  8. Oktay, S. T., Suh, N. P., 'Wear Debris Formation and Agglomeration,' J. Tribol.-T. ASME, Vol. 114, pp. 379-393, 1992 https://doi.org/10.1115/1.2920897
  9. Capella, B., Dietler, G., 'Force-distance Curves by Atomic Force Microscopy,' Surf. Sci. Rep., Vol. 34, pp. 1-104, 1999 https://doi.org/10.1016/S0167-5729(99)00003-5
  10. Johnson, K. L., 'Mechanics of Adhesion,' Tribol. Int., Vol. 31, No. 8, pp. 413-418, 1998 https://doi.org/10.1016/S0301-679X(98)00060-7
  11. Ikawa, N., Shimada, S., Tanaka, H., and Ohmori, G., 'Atomistic Analysis of Nanometric Chip Removal as Affected by Tool-Work Interaction in Diamond Turning,' Ann. CIRP, Vol. 40, pp. 551-554, 1991 https://doi.org/10.1016/S0007-8506(07)62051-4
  12. Maekawa, K., 'Friction and Tool Wear in Nano-scale Machining- A Molecular Dynamics Approach,' Wear, Vol. 188, pp. 115-122, 1995 https://doi.org/10.1016/0043-1648(95)06633-0
  13. Zhang, L., Tanaka, H., 'Towards a Deeper Understanding of Friction and Wear on the Atomic Scale: A Molecular Dynamics Analysis,' Wear, Vol. 211, pp. 44-53, 1997 https://doi.org/10.1016/S0043-1648(97)00073-2
  14. Kim, D. E., Suh, N. P., 'Molecular Dynamics Investigation of Two-Dimensional Atomic-Scale Friction,' J. Tribol.-T. ASME, Vol. 116, pp. 225-231, 1994 https://doi.org/10.1115/1.2927200
  15. 정구현, 이성창, 김대은, '분자정역학 기법을 이용한 초미세 절삭특성에 관한 고찰,' 한국정밀공학회지, 제 14 권, 제 3호, pp. 122-129, 1997
  16. Sundararajan, S., Bhushan, B., 'Topography-induced Contributions to Frictional Forces Measured Using an Atomic Force Microscope,' J. Appl. Phys., Vol. 88, No. 8, pp. 4825-4831, 2000 https://doi.org/10.1063/1.1310187
  17. Muller, T., Lohrmann, M., Kasser, T., Marti, O., Mlynek, J., and Krausch, G., 'Frictional Force between an Sharp Asperity and a Surface Step,' Phys. Rev. Lett., Vol. 79, No. 25, pp. 5066-5069, 1997 https://doi.org/10.1103/PhysRevLett.79.5066
  18. Guntherodt, H. J., 'Friction force microscopy,' in Forces in Scanning Probe Methods, pp. 285-306, Kluwer Academic Publishers, 1995
  19. Sung, I. H., Lee, H. S., and Kim, D. E., 'Effect of Surface Topography on the Frictional Behavior at Micro/Nano-scale,' 3rd International Colloquium Micro-Tribology, Poland, 2001, (Wear, Submitted)
  20. Tian, H., Suh, N. P., and Saka, N., 'Boundary Lubrication Studies on Undulated Titanium Surfaces,' Tribol. T., Vol. 32, pp. 289-296, 1989 https://doi.org/10.1080/10402008908981891
  21. Kim, D. E., Suh, N. P., 'Decoupled Design of Cylinder Liner for IC Engines,' SAE Paper, No.911231, pp. 99-106, 1992
  22. Suh, N. P., Saka, N., 'Surface Engineering,' Ann. CIRP, Vol. 36, pp. 403-408, 1987 https://doi.org/10.1016/S0007-8506(07)62632-8
  23. Hwang, D. H., Kim, D. E., and Lee, S. J., 'Influence of Wear Particle Interaction in the Sliding Interface on Friction of Metals,' Wear, Vol. 225, pp. 427-439, 1999 https://doi.org/10.1016/S0043-1648(98)00371-8
  24. Cha, K. H., Chung, K. H., and Kim, D. E., 'Effect of Slider Load on the Wear Debris Contamination Tendency of Head/Slider,' IEEE T. Magn., Vol. 35, No. 5, pp. 2355-2357, 1999 https://doi.org/10.1109/20.800823
  25. Cha, K. H., Kim, D. E., 'Tribological Properties of Micro-Undulated Silicon Under Light Load,' International Tribology Conference, Nagasaki, Japan, pp. 296, 2000
  26. Deng, K., Collins, R. J., Mehregany, M., and Sukenik, C. N., 'Performance Impact of Monolayer Coating of Polysilicon Micromotors,' J. Electochem. Soc., Vol. 142, pp. 1278-1285, 1995 https://doi.org/10.1149/1.2044164
  27. Cha, K. H., Kim, D. E., 'Investigation of the Tribological Behavior of Octadecyltrichlorosilane Deposited on Silicon,' Wear, Vol. 251, pp. 1169-1176, 2001 https://doi.org/10.1016/S0043-1648(01)00729-3
  28. Srinivasan, U., Houston, M. R., and Howe, R. T., 'Alkyltrichlorosilane-Based Self-Assembled Monolayer Films for Stiction Reduction in Silicon Micro-Machines', J. Microelectromech. S., Vol. 7, pp. 252-260, 1998 https://doi.org/10.1109/84.679393
  29. Archard, J. F., 'Contact and Rubbing of Flat Surfaces,' J. Appl. Phys., Vol. 24, pp. 981-988, 1953 https://doi.org/10.1063/1.1721448
  30. Rabinowicz, E., Friction and Wear of Materials, John Wiley & Sons, 1995
  31. Wienss, A., Persch-Schuy, G., Vogelgesang, M., and Hartmann, U., 'Scratching Resistance of Diamond-Like Carbon Coatings in the Subnanometer Regime,' Appl. Phys. Lett., Vol. 75, No. 8, pp. 1077-1079, 1999 https://doi.org/10.1063/1.124602
  32. Bhushan, B., Koinkar, V. N., 'Nanoindentation Hardness Measurements Using Atomic Force Microscopy,' Appl. Phys. Lett., Vol. 64, No. 13, pp. 1653-1655, 1994 https://doi.org/10.1063/1.111949
  33. Chung, K. H., Han, D. K., Park, J. W., Lee, S. C., and Kim, D. E., 'Feasible Method for Accelerated Testing of Head-Disk Interface Tribological Behavior,' J. Inf. Stor. Proc. Syst., Vol. 3, pp. 17-26, 2001
  34. Knurshudov, A., Kato, K., 'Wear of the Atomic Force Microscope Tip under Light Load, Studied by Atomic Force Microscopy,' Ultramicroscopy, Vol. 60, pp. 11-16, 1995 https://doi.org/10.1016/0304-3991(95)00071-8
  35. Kim, D. E., Yi, J. J., 'Micro-patterning of Silicon by Frictional Interaction and Chemical Reaction,' J. Tribol.-T. ASME, Vol. 120, No. 2, pp. 353-357, 1998 https://doi.org/10.1115/1.2834434
  36. Lee, J. M., Jin, W. H., and Kim, D. E., 'Application of Single Asperity Abrasion Process for Surface Micro-machining,' Wear, Vol. 251, pp. 1133-1143, 2001 https://doi.org/10.1016/S0043-1648(01)00756-6
  37. Lee, J. M., Sung, I. H., and Kim, D. E., 'Process Development of Precision Surface Micro-machining Using Mechanical Abrasion and Chemical Etching,' Microsyst. Technol., 2002, In press https://doi.org/10.1007/s00542-002-0193-7
  38. Wendel, M., Kuhn, S., Lorenz, H., Kottahaus, J. P., and Holland, M., 'Nanolithography with an Atomic Force Microscope for Integrated Fabrication of Quantum Electronic Devices,' Appl. Phys. Lett., Vol. 65, No. 14, pp. 1775-1777, 1994 https://doi.org/10.1063/1.112914
  39. Sung, I. H., Lee, H. S., and Kim, D. E., 'Influence of Surface Properties on Micro/Nano-Scale Tribological Behavior of Silicon,' Proceedings of the 32nd ISR(International Symposium on Robotics), Seoul, Korea, pp. 1921-1925, 2001
  40. Kim, D. E., Park, J. W., Han, D. K., Park, Y. S., Chung, K. H., and Park, N. Y., 'Strategies for Improvement of Tribological Characteristics at the Head/Disk Interface,' IEEE T. Magn., Vol. 37, No. 2, pp. 912-917, 2001 https://doi.org/10.1109/20.917641