한국응용과학기술학회지 (Journal of the Korean Applied Science and Technology)
- 제18권3호
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- Pages.191-196
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- 2001
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- 1225-9098(pISSN)
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- 2288-1069(eISSN)
DOI QR Code
Pentacene을 활성층으로 이용한 유기 TFT의 특성 연구
Study on the Characteristics of Organic TFT Using Pentacene as a Active Layer
- Kim, Young-Kwan (Dept. of Chemical Engineering, Hongik University) ;
- Sohn, Byoung-Chung (Dept. of Chemical Engineering, Hongik University) ;
- Kim, Yun-Myoung (Dept. of Electrical Information & Control Engineering, Hongik University) ;
- Pyo, Sang-Woo (Dept. of Electrical Information & Control Engineering, Hongik University)
- 발행 : 2001.09.30
초록
Organic semiconductors based on vacuum-deposited films of fused-ring polycyclic aromatic hydrocarbon have great potential to be utilized as an active layer for electronic and optoelectronic devices. In this study, pentacene thin films and electrode materials were deposited by Organic Molecular Beam Deposition (OMBD) and vacuum evaporation respectively. For the gate dielectric layer, photoacryl (OPTMER PC403 from JSR Co.) was spin-coated and cured at