대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

이온질량분석기의 제작과 그 동작특성

Fabrication of Ion Mass Analyzer and its Operational Characteristics

  • 김광훈 (한국전기연구원 플라즈마 가속기 연구단) ;
  • 최영욱 (한국전기연구원 전기물리그룹) ;
  • 이홍식 (한국전기연구원 전기물리그룹) ;
  • 임근희 (한국전기연구원 산업전기연구단) ;
  • 발행 : 2001.08.01
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⟨ 이전 논문 다음 논문 ⟩

초록

The information of the ion composition in plasma applications is required to characterize a plasma. A better understanding of ion species composition ratio and its spacial distribution, etc. is thus necessary in plasma-related processes, such as thin film deposition, plasma-based ion implantation, semiconductor processing, and so on. In this research, a compact ion mass analyzer that is based on magnetic sector analyzer was developed and its operational characteristics were studied in nitrogen plasma.

키워드

참고문헌

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