The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication and Characterization of Suspended-type Thin Film Resonator Using SOI-Micromachining Process

SOI 마이크로머시닝 공정을 이용한 Suspended-type 박막공진기의 제작 및 특성평가

  • Published : 2001.06.01
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Abstract

STFR were fabricated on the floating membrane which was formed by SOI-micromachining process. The floating membranes having a thickness range of $3{\sim}15{\mu}m$ could be simply formed by micromachining the directly-bonded and thinned SOI substrate. The STFR device fabricated on the $15{\mu}m$-thick membrane showed resonance frequency of fr = 1.65 GHz, coupling coefficient of Keff2 = 2.4 %, and series and parallel quality factors of Qs = 91.7 and Qp = 87.7, respectively.

Keywords

References

  1. C.T.-C. Nguyen, L.P.B.Katehi and G.M.Rebeiz, 'Micromachined devices for wireless communications,' Proceeding of The IEEE, vol.86, no.8, pp.1756-1768 (1998.8.) https://doi.org/10.1109/5.704281
  2. 백경갑, 주병권, 김희중, 오명환, 정보통신분야의 초소형 정밀기계, 월간 전자부품, pp.154-163 (1998.12.)
  3. 백경갑, 주병권, 앞서 배우는 마이크로 시스템, 인터비젼, pp.15-29 (2000.2.)
  4. Compact FBAR Filters Offer Low Loss Performance,' Microwave & RF, pp. 127-136, September 1991
  5. Kenneth M. Lakin, Gerald R. Kline, and Kevin T. McCarron, 'High-Q Microwave Acoustic Resonators and Filters,' IEEE Transactions on Microwave Theory and Techniques, Vol. 41, No. 12, December 1993 https://doi.org/10.1109/22.260698
  6. L. Mang, R. Hickernell, R. Pennell and T. HickemeU, 'Thin-film Resonator Ladder Filter,' IEEE MTT-S Digest, 1995 https://doi.org/10.1109/MWSYM.1995.405905