The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Preparation of ZnO thin film for SAW filter

SAW Filter용 ZnO 박막의 제작

  • 성하윤 (경원대 공대 전기전자공학과) ;
  • 양진석 (경원대 공대 전기전자공학과) ;
  • 금민종 (경원대 공대 전기전자공학과) ;
  • 손인환 (신성대 전기과) ;
  • 김경환 (경원대 공대 전기정보·전자공학부)
  • Published : 2001.05.01
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Abstract

Piezoelectric ZnO thin films by Facing Targets Sputtering(FTS) method were deposited on slide glass. The Facing Targets Sputtering system can deposit thin film at plasma-free condition and change the deposition condition in wide range. The characteristics of ZnO thin films changed with power, working pressure and substrate temperature were investigated by XRD(x-ray diffractometer), alpha-step(Tencor) and SEM(Scanning Electron Microscopy) analyses. In the results, we suggest that FTS system is very suitable for the preparation of high quality ZnO thin films with good c-axis orientation.

Keywords

References

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