초록
Ozone has been widely applied to many industrial fields because of its strong oxidation power, Therefore, the studies have been carried out for the methods on an effective and high concentration ozone generation. The silent or surface discharge type ozone generators have been mainly used for high concentration ozone generation in many fields of applications. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above ozone generators was proposed and fabricated for the high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrode was proposed and studied as a function of the widths output maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], for 0.3[mm] width and 0.8[mm] vacancy of the mesh electrode and gap spacing of 0.65[mm] respectively.