Technology Trend of Ion Implantation Applications in CMOS Fabrication

References

1. Ion Implantation Science and Technology J. F. Ziegler.
2. Nucl. Instrum. And Meth. In Phys. Res. v.B no.93 Application of Advanced Ion Implantation Techniques to Flash Memories P. Cappeletti, et al.
3. Advanced Ion Implantation Brings New Changes J. Boland.
4. Spreadsheet Calculations of Doping Requirements for Roadmap U. Jeong.
5. The 8th Korean Conference on Semiconductors On the Gate Oxide Scaling of Sub-100nm High Performance CMOS Transistors S. Song et al.
6. VSEA internal Report Directions in Advanced Doping One Perspective C. Osburn.
7. A Business Perspective on the National Technology Roadmap for Semiconductors K. Rinmen.
8. High Energy Ion Implanters and Applications Take Off L. Rubin. et al.,