Tribology and Lubricants

  • 제17권3호
  • /
  • Pages.191-197
  • /
  • 2001
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  • 2713-8011(pISSN)
  • /
  • 2713-802X(eISSN)
한국트라이볼로지학회 (Korean Tribology Society)
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SPM을 이용한 접촉조건 변화에 따른 미소응착 및 마찰특성에 관한 연구

A study on the Nano adhesion and Friction at Different Contact Conditions using SPM

  • 윤의성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 박지현 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센터)
  • 발행 : 2001.06.01
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초록

Nano adhesion and friction characteristics between SPM(scanning electron microscope) tips and flat plates of different materials were experimentally studied. Tests were performed to measure adhesion and friction in AFM(atomic force microscope) and LFM(lateral force microscope) modes in different conditions of relative humidity. Three different Si$_3$N$_4$ tips (rdaii : 15nm, 22nm and 50 nm) and three different flat plates of Si-wafer(100), W-DLC(tungsten-incorporated diamond-like carbon) and DLC were used. Results generally showed that adhesion and friction increased with the tip radius, and W-DLC and DLC surfaces were superior to Si-wafer. But the adhesion force of Si-wafer showed non linearity with the tip radius while W-DLC and DLC surfaces showed good correlation to the “JKR model”. It was found that high adhesion force between Si-wafer and a large radius of tip was caused by a capillary action due to the condensed water.

키워드

참고문헌

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피인용 문헌

  1. 코팅 방법에 따른 이종 SAMs의 관능기별 마이크로/나노 응착 및 마찰 특성 vol.21, pp.3, 2001, https://doi.org/10.9725/kstle.2005.21.3.107