Progress in Superconductivity
- 제3권1호
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- Pages.49-55
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- 2001
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- 1229-4764(pISSN)
Self-Aligning 기술과 반응성 이온 식각 기술로 제작된 Nb 조셉슨 접합 어레이의 특성
Fabrication of All-Nb Josephson Junction Array Using the Self-Aligning and Reactive ion Etching Technique
- Hong, Hyun-Kwon (Chungbuk National University, Chongju) ;
- Kim, Kyu-Tea (Korea Research Institute of Standards and Science, Deajeon) ;
- Park, Se-Il (Korea Research Institute of Standards and Science, Deajeon) ;
- Lee, Kie-Young (Chungbuk National University, Chongju)
- 발행 : 2001.01.01
초록
Josephson junction arrays were fabricated by DC magnetron sputtering, self-aligning and reactive ion etching technique. The Al native oxide, formed by thermal oxidation, was used as the tunneling barrier of Nb/