한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제18권8호
  • /
  • Pages.11-17
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  • 2001
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

금속 절삭공구에 대한 PVD 코팅기술의 동향

Tendency of PVD coating technology on Metal cutting tools

  • 발행 : 2001.08.01
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초록

Industrial use of physical vapor deposition(PVD) has been widely expanded during last two decades, and in the mean time plasma assistance in PVD has become an essential tool in preparing compound films with dense microstructure. The principles of electron beam-based plating, balanced and unbalanced magnetron sputtering and cathodic arc deposition. consisting three basic configuration of plasma assisted PVD(PAPVD)process, were reviewed. Recent technical development in PVD coating process were discussed. This paper tries to show tendency for developing new coating film on cutting tools.

키워드

참고문헌

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