Journal of the Optical Society of Korea

Optical Society of Korea (한국광학회)
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Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology

  • Rhee, Hyug-Gyo (Department of mechanical Engineering, BUPE Creative Research Initiative Group, Korea Advanced Institute of Science and Technology) ;
  • Chu, Ji-Young (Department of mechanical Engineering, BUPE Creative Research Initiative Group, Korea Advanced Institute of Science and Technology) ;
  • Kim, Seung-Woo (Department of mechanical Engineering, BUPE Creative Research Initiative Group, Korea Advanced Institute of Science and Technology)
  • Received : 2001.09.10
  • Published : 2001.12.01
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Abstract

We present a new method of volumetric interferometer, which is intended to measure the three-dimensional coordinates of a moving object in a simultaneous way with a single optical setup. The method is based on the principles of phase-measuring interferometry with phase shifting. Two diffraction point sources, which are made of the polished ends of single-mode optical fibers are embedded on the object. Two spherical wavefronts emanate from the diffraction point sources and interfere with each other within the measurement volume. One wavefront is phase-shifted by elongating the corresponding fiber using a PZT extender. A CCD array sensor fixed at the stationary measurement station detects the resulting interference field. The measured phases are then related to the three-dimensional location of the object with a set of non-liner equations of Euclidean distance, from which the complete set of three-dimensional spatial coordinates of the object is determined through rigorous numerical computation based upon the least square error minimization.

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References

  1. J. B. Bryan, Precision Eng. 1, 129 (1979) https://doi.org/10.1016/0141-6359(79)90037-0
  2. O. Nakamura, M. Goto, K. Toyoda, Y. Tanimura, and T. Kurosawa, Ann. CIRP 40, 523 (1991) https://doi.org/10.1016/S0007-8506(07)62045-9
  3. O. Nakamura and M. Goto, Appl. Opt. 33, 31 (1994) https://doi.org/10.1364/AO.33.000031
  4. E. B. Hughes, A Wilson, and G. N. Peggs, Ann. CIRP 49, 391 (2000) https://doi.org/10.1016/S0007-8506(07)62972-2
  5. A. Ishimaru, Electromagnetic wave propagation, radiation, and scattering (Prentice-Hall, Inc., 1991), 156
  6. S. Kimura and T. Wilson, Appl. Opt. 30, 2143 (1991) https://doi.org/10.1364/AO.30.002143
  7. I. B. Kong and S. W. Kim, Opt. Eng. 34, 183 (1995) https://doi.org/10.1117/12.184088
  8. A. D. Belegundu and T. R. Chandrupatla, Optimization concepts and applications in engineering (Prentice-Hall, Inc., 1999),74
  9. P. E. Gill and W. Murray, J. Inst. Maths. Applns. 9, 91 (1972) https://doi.org/10.1093/imamat/9.1.91
  10. J. E. Dennis and R. B. Schnabel, Numerical methods for unconstrained optimization and nonlinear equations (Prentice-Hall, Inc., 1983), 1163
  11. T. R. Chandrupatla, Computer Methods in Applied Mechanics and Engineering 152, 211 (1999) https://doi.org/10.1016/S0045-7825(97)00190-4

Cited by

  1. Three-dimensional relative-distance measurement by use of the phase-shifting digital holography vol.14, pp.2, 2003, https://doi.org/10.3807/KJOP.2003.14.2.200