Transactions on Electrical and Electronic Materials
- Volume 2 Issue 2
- /
- Pages.32-36
- /
- 2001
- /
- 1229-7607(pISSN)
- /
- 2092-7592(eISSN)
Study on Sol-Gel Prepared Phosphosilicate Glass-Ceramic For Low Temperature Phosphorus Diffusion into Silicon
- Kim, Young-Sig (Department of Mineral and Energy Engineering Chonnam National University)
- Published : 2001.06.01
Abstract
A new solid source for low temperature diffusion into silicon was developed. The source wafer consists of an “active” compound, which is sol-gel prepared phosphosilicate glass-ceramics containing 56% P