Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Compact and Fast Measurement System for the Detection of Small Capacitance

  • Youngshin Woo (Semiconductor & CAD Lab., Department of Electrical Engineering Korea Univ.) ;
  • Sung, Man-Young (Semiconductor & CAD Lab., Department of Electrical Engineering Korea Univ.)
  • Published : 2001.03.01
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Abstract

A new technique to measure low level capacitance variations of a gyroscope is proposed. It is based on the improved CVC(capacitance to voltage converter) biased by a d.c. current source and the peak detector without any low pass filter. This setup of the measurement system makes it possible to provide higher speed of measurement and wide operation range. The d,c, drift of the conventional CVC and stray capacitances are automatically compensated. Key parameters that affect the performance of the measurement system are illustrated and computer simulation results are presented. The demonstrated measurement system for micromachined gyroscope applications shows a linearity of 0.99972 and a resolution of 0.67fF from 10 fF to 120 fF at 10 kHz.

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