Transactions on Electrical and Electronic Materials

  • 제2권1호
  • /
  • Pages.7-11
  • /
  • 2001
  • /
  • 1229-7607(pISSN)
  • /
  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Determination of the Inelastic cross Sections for $C_{3}F_{8}$ Molecule by electron Swarm Study

  • Jeon, Byung-Hoon (Department of Computer Aided Design, Joong Bu University) ;
  • Ha, Sung-Chul (Department of Electrical Engineering, Dong Guk University) ;
  • Yang, Jeong-Mo (Department of Information Communication, Joong Bu University)
  • 발행 : 2001.03.01
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초록

We measured the electron transport coefficients, the electron drift velocity, W, and the longitudinal diffusion coefficient, $D_{L}$, over the E/N range from 0.03 to 100 Td and gas pressure range from 0.133 to 122 kPa in the 0.526% and 5.05% $C_{3}F_{8}$-Ar mixtures by the double shutter drift tube with variable drift distance. And we calculated these electron transport coefficients by using multi-term approximation of Boltzmann equation analysis. We determined the electron collision cross sections set for $C_{3}F_{8}$ molecule by the comparison of measurement and calculation. Our special attention in the present study was focused upon the inelastic collision cross sections of the $C_{3}F_{8}$ molecule.

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