Fabrication and Characteristics Test of Micro Heat Pipe Array for IC Chip Cooling

IC 칩 냉각용 초소형 히트 파이프의 제작 및 성능 평가

  • Published : 2001.07.01

Abstract

This paper presents an experimental investigation on the heat trensfer characteristic of micro pipe (MHP) array with 38 triangular microgrooves. A heat pipe is an effective heat exchanger operating without external power. The heat pipe transfers heat by means of the latent heat of vaporization and two-phase fluid flow driven by the capillary force. The overall size of the MHP array can be put undermeath a microelectonic die and integrated into the electrronic package of a microelectronin device to dissipate the heat from the die. The MHP array is fabricated by micromachining with a silicon wafer and a glass substrate. The MHP was filled with water and sealed. The experimental results show the temperature decrease of 12.1$^{\circ}C$ at the evaporator section for the input power of 5.9 W and the improvement of 28% in the heat transfer rate.

Keywords

References

  1. K. E. Goodson, K. Kurabayashi, and R. Fabian W. Pease, 'Improved Heat Sinking for Laser-Diode Arrays Using Microchannles in CVD Diamond,' IEEE CPMT, part B. vol. 20, pp. 104-109, 1997 https://doi.org/10.1109/96.554536
  2. T. Kishimoto, S. Sasaki, K. Kaizu, K. Genda, and K. Endo, 'Heat-Pipe Cooling Technology for High-Speed ATM Switching Multichip Modules', IEICE Trans. Electron., vol. E78 C, no. 5, pp. 564-573, 1995
  3. A. Miner, A. Majumdar, U. Ghoshal, 'Thermo-Electro-Mechanical Refrigeration Using Transient Thermoelectric Effects', Applied Physics Letters, vol. 75, pp. 1176-1l78, 1999 https://doi.org/10.1063/1.124634
  4. S. Wu, J. Mai, Y. C. Tai, and C. M. Ho, 'Micro Heat Exchanger by Using MEMS Impinging Jets,' MEMS 99, pp. 171-176, 1999 https://doi.org/10.1109/MEMSYS.1999.746799
  5. GP Peterson, 'Modeling, Fabrication, and Testing of Micro Heat Pipes:An Update', Appl. Mech. Rev. vol. 49, no. 10, part 2, pp. S175-S183 1996