한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제18권3호
  • /
  • Pages.169-174
  • /
  • 2001
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

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Fabrication of Microshafts using Electrochemical Process

  • 임영모 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 임형준 (한국과학기술원 기계공학과) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Lim, Young-Mo ;
  • Lim, Hyung-Jun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 2001.03.01
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초록

We proposed a new fabrication method using electrochemical process for microshafts. This method is a kind of atomic removal process by chemical reaction. Therefore, it is possible to make thin and long shafts regardless of the stiffness of materials. Because shaping process is simply switched to polishing process by varying process conditions, we can precisely fabricate microshafts with very smooth surface. We also fabricated a very thin shaft with the diameter as small as 10$\mu$m and a microshaft with high aspect ratio.

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참고문헌

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