한국전자파학회논문지 (The Journal of Korean Institute of Electromagnetic Engineering and Science)

  • 제12권1호
  • /
  • Pages.27-36
  • /
  • 2001
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  • 1226-3133(pISSN)
  • /
  • 2288-226X(eISSN)
한국전자파학회 (The Korean Institute of Electromagnetic Engineering and Science)
권호 표지

Micromachined Millimeter-Wave Cavity Resonators

  • Song, K.J. (RFIC Research and Education Center & Mission Technology Research Center, Kwangwoon University) ;
  • Yoon, B.S. (RFIC Research and Education Center & Mission Technology Research Center, Kwangwoon University) ;
  • Lee, J.C. (RFIC Research and Education Center & Mission Technology Research Center, Kwangwoon University) ;
  • Lee, B. (RFIC Research and Education Center & Mission Technology Research Center, Kwangwoon University) ;
  • Kim, J.H. (RFIC Research and Education Center & Mission Technology Research Center, Kwangwoon University) ;
  • Kim, N.Y. (RFIC Research and Education Center & Mission Technology Research Center, Kwangwoon University) ;
  • Park, J.Y. (Microsystem and RF Team, Materials and Device Laboratory, LF Electronics Institute of Technology) ;
  • Kim, G.H. (Microsystem and RF Team, Materials and Device Laboratory, LF Electronics Institute of Technology) ;
  • Bu, J.U. (Microsystem and RF Team, Materials and Device Laboratory, LF Electronics Institute of Technology) ;
  • Chung, K.W. (Microsystem and RF Team, Materials and Device Laboratory, LF Electronics Institute of Technology)
  • 발행 : 2001.01.01
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초록

In this paper, micromachined millimeter-wave cavity resonators ar presented. One-port and two-port cavity resonators at Ka-band are designed using 3D design software, HP $HFSS^{TM}$ ver. 5.5 Cavity resonators are fabricated on Si substrate, which is etched down for the cavity, bonded with a Quartz wafer in which metal patterns for the feeding line coupling slot are formed. One-port resonator shows the resonant frequency of 39.34 GHz, the return loss of 14.5 dB, and the loaded $Q(Q_{L})$ of 150. Two-port cavity resonator shows the resonant frequency of 39 GHz, the insertion and return losses of 4.6dB and 19,9dB, the loaded($Q_{L}$) and unloaded $Q(Q_{U})$) of 44.3 and 107, respectively.

키워드

참고문헌

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