대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

이식형 중이 보청기에 적용 가능한 Si 탄성체로 구현된 전자기 진동 트랜스듀서

Electromagnetic Vibration Transducer Using Silicon Elastic Body For Implantable Middle Ear Hearing Aid Applications

  • 이기찬 (경북대 대학원 전기공학과) ;
  • 이세규 (경북대 대학원 전기공학과) ;
  • 박세광 (경북대 전자전기공학부) ;
  • 조진호 (경북대 전자전기공학부) ;
  • 이상흔 (경북대 의과대학 이비인후과)
  • 발행 : 2000.10.01
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초록

This paper presents the design and fabrication of micro electromagnetic vibration silicon elastic body characterized with small size, high efficiency and selective frequency bandwidth for Bio-MENS applications, such as implantable middle ear hearing aid. The presented electromagnetic vibration transducer that composed of wounded coil, permanent magnet and 4-beam cross type elastic body is fabricated by using of micromachining technology. The fabricated transducer has experimental characteristics, that is 5 nm/mA of an energy trasfer rate at the frequency range of 100∼2800 Hz. It has a size of $2{\times}2{\times}2.5\;mm^3$.

키워드

참고문헌

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