Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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PC 기반의 다이싱 공정 자동화 시스템 개발

  • 김형태 (한양대학교 대학원) ;
  • 양해정 (한국산업기술대학교 기계설계학) ;
  • 송창섭 (한양대학교 기계공학부)
  • Published : 2000.03.01
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Abstract

In this study, PC-based dicing machine and driving software were constructed for the purpose of automation of wafer cutting process. To automate the machine, hard automation including vision, loading, and software were considered in the development. Auto loading device and vision system were adopted for the increase of productivity, GUI software programmed for the expedient operation. The dicing machine is operated by the control algorithm and some parameters. It is verified that this kind of PC based automation has a great potential compared with the conventional dicing machine when applied to manufacturing some kinds of wafers as a test purpose.

Keywords

References

  1. 오점준, '반도체 칩 Saw 변수 최적화를 통한 품질향상에 관한 연구,' 한양대학교 산업대학원 석사학위 논문, pp. 1-7, 1993
  2. Honda, 'Method and apparatus for slicing semiconductor wafers,' US patent No. US5524604, 1993
  3. Boruta, 'Multi cut wafer saw process,' US patent No. US5786266, 1996
  4. 이동준, '반도체 개요.제조.기술,' 금호 출판사, pp. 170-203, 1987
  5. 생산기술연구원, '공업기술 수요조사 보고서 (IV)- 전기 전자분야,' 상공부, pp. 1091-1108, 1990
  6. 고경영, 이중호, 차영엽, '역전파 알고리즘을 이용한 웨이퍼의 다이싱 상태 예측,' 제어계측.자동화.로보틱스연구회 합동학술발표회, pp. 107-110, 1999
  7. Rolf Isermann, 'Mechatronics Systems - Concepts and Applications,' Proceedings of the 5th International Conference on Control, Automation, Robotics and Vision, Vol. 2, pp. 1175-1188, 1998
  8. Bright, Potgieter, 'PC-Based Mechatronic Robotic Plug and Play System for Part Assembly Systems,' Proceedings of the IEEE International Symposium on Industrial Electronics, pp. 426-429, 1998 https://doi.org/10.1109/ISIE.1998.711560
  9. 西本 澄 外 4 人, '生産システムとメカトロニクス,' 日本精密工學會誌, Vol. 64, No. 6, pp. 813-818, 1998
  10. Serope Kalpakjian, 'Manufacturing Engineering and Technology 2nd Ed.,' Addison Wesley, pp.1116-1123, 1992
  11. Sava, Pusztai, 'Computer Numerical Control Programming,' Prentice-Hall, pp. 210-214, 1990
  12. 김형태, 양해정, 송창섭, '윈도우 기반의 반도체 절단 공정의 자동화 시스템,' 한국정밀공학회 추계학술대회 논문집, pp. 750-753, 1998
  13. Jack W. Chaplin, 'Instrumentation and Automation for Manufacturing,' Delmar Publishers Inc., pp. 360-378, 1992
  14. Phillip J. McKerrow, 'Introduction to Robotics,' Addison Wesley, pp. 113-116, 1991
  15. 김형태, 양해정, 송창섭, 'GUI를 이용한 슬라이싱 머신의 자동화 알고리즘 개발,' 한국정밀공학회지, Vol. 16, No. 7, pp. 85-93, 1999
  16. Insook, Robin, 'Human-Machine Performance Configuration for Computational Cybernetics,' Proceedings of the 1997 IEEE International Conference on Systems, Man, and Cybernetics, pp. 4254-4259, 1997 https://doi.org/10.1109/ICSMC.1997.637368
  17. Ramesh, Rangachar, 'Machine Vision,' McGraw Hill, pp. 80-82, 1995
  18. Rafael, Richard, 'Digital Image Processing,' Addison Wesley, pp. 443-458, 1992