참고문헌
- 大嫁二郞, 超精密位置決め技術の現狀と今後, 日本精密工學會誌, Vol.16, No. 12, 1995
- The National Technology Roadmap for Semiconductors
- 朴天弘, '超精密位置決のに關すゐ 專門委員會 定例會 講演 前刷集,' 日本精密工學會, 1996
- J. Otsuka, N. Iida, Y. Kawase, 'Ultra-precision Positioning Using Lead Screw Drive(l st Report)-Fundamental Study Using a Sliding Screw or Ball Screw,' Journal of the Japan Society for Precision Engineering, Vol.56, No.11, 1990
- Y. Kawase, J. Otsuka, S. Fukada, Y. Aoki, N. Iida, 'Ultra-precision Position Using Lead Screw Drive(2nd Report) - Nanometers Accuracy Positioning by Improved Proportional Gain Characteristic,' Journal of the Society for Precision Engineering, Vol. 57, No.7, 1991
- J. Otsuka, N. Iida, Y. Kawase, R. Akino, S. Fukada, 'Ultra-precision Positioning Using Lead Screw Drive(3'd Report) - Nanometer Accuracy Positioning and Settling Time Reduction,' Journal of the Japan Society for Precision Engineering, Vol.59, No. 10, 1993
- Delta Tau Data Systems, 'PMAC User's Manual', 1996
- Sony Laserscale Detector Unit BD10 Instruction Manual 1st Edition(Revised 1)
- Vibration Control 1997 catalog, Newport
- Parker Motion & Control catalog
- Pierre E. Dupont, EricP. Dunlap, 'Friction Modeling and PD Compensation at Very Low Velocites,' Journal of Dynamic System, Measurement and Control, Vol.117/9, March, 1995
- Brian Armstrong-Helouvry, 'Stick-Slip and Control in Low-Speed Motion,' IEEE Transactions on automatic control, Vol.38, No. 10, 1993 https://doi.org/10.1109/9.241562
- Brian Armstrong-Helouvry, Pierre Dupont, Carlos Canudas De Wit, 'A Survey of Models, Analysis Tools and Compensation Methods for the Control of Machines with Friction,' Automatica, Vol.30, No.7, pp1083-1138,1994 https://doi.org/10.1016/0005-1098(94)90209-7
- Benjamin C. Kuo, 'Automatic control systems,' Fifth Edition
- Fifth Edition Automatic control systems Benjamin,C.Kuo