대한전자공학회논문지SD (Journal of the Institute of Electronics Engineers of Korea SD)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

비냉각 금속 박막형 열전퇴 적외선 검지기

Uncooled Metallic Thin-film Thermopile Infrared Detector

  • 오광식 (경북대학교 전자전기공학부) ;
  • 조현덕 (경북대학교 전자전기공학부) ;
  • 김진섭 (인제대학교 전자정보통신공학부) ;
  • 이용현 (경북대학교 전자전기공학부) ;
  • 이종현 (경북대학교 전자전기공학부) ;
  • 이정희 (경북대학교 전자전기공학부) ;
  • 박세일 (한국표준과학연구원 전자기연구부)
  • Oh, Kwang-Sik (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Cho, Hyun-Duk (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Kim, Jin-Sup (Dept.of Electronics Information Communication Engineering, Inje University) ;
  • Lee, Yong-Hyun (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Lee, Jong-Hyun (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Lee, Jung-Hee (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Park, Se-Il (Electromagnetics Group. Division of electromagectic Metrology, Korea Rsearch Institute of standards and science)
  • 발행 : 2000.02.01
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초록

열전퇴의 고온 접합부가 Si/sub 3/N/sub 4//SiO/sub 2//Si/sub 3/N/sub 4/ 멤브레인에 의해 실리콘 기판으로부터 열차단되고, 열전퇴의 저온 접합부는 방열판 역할을 하는 실리콘 림(rim)에 의해 지지되는 멤브레인위에 놓여지며, Au-black이 적외선 흡수체로 사용되는 비냉각 금속 박막형 열전퇴 적외선 검지기를 제작하고, 적외선 검지기의 성능지수에 대해 논의하였다. 3∼14㎛의 파장범위에서 Au-black의 적외선 흡수도는 대개 90%정도였고, Au 증발시의 챔버압력 및 증착된 Au-black의 단위면적당 질량에 크게 의존하였다. 쵸핑 주파수가 5 Hz일 때 Bi-Sb 열전퇴 적외선 검지기의 전압 감응도, 잡음등가전력 및 비검지도는 실온의 공기중에서 각각 약 10.5V/W, 2.3 ㎻/㎐½, 및 1.9×10/sup 7/㎝·㎐½/w였다.

Uncooled metallic thin-film thermopile infrared detectors have been fabricated, and the figures of merit for the detectors were examined. The hot junctions of a thermopile were prepared on a $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$-membrane which acts as a thermal isolation layer, the cold junctions on the membrane supported with the silicon rim which functions as a heat sink, and Au-black was used as an infrared absorber. Infrared absorbance of Au-black, which strongly depends on the chamber pressure during Au-evaporation and its mass per area, was found to be about 90 ％ in the wavelength range from 3${\mu}{\textrm}{m}$ to 14${\mu}{\textrm}{m}$. Voltage responsivity, noise equivalent power, and specific detectivity of Bi-Sb thermopile infrared detector at 5 Hz-chopping frequency were about 10.5V/W, 2.3 nW/Hz$^{1/2}$, 및 $1.9\times10^{7}$ cm.Hz$^{1/2}$/w at room temperature in air, respectively.

키워드

참고문헌

  1. William Nunley and J. Scott Bechtel, Infrared optoelectronics-devices and applications, Marcel Dekker, Inc., 1987
  2. E. L. Dereniak and G. D. Boreman, Infrared detectors and systems, A Wiley lnterscience Publication, 1996
  3. Paul W. Kruse and David D. Skatrud, Uncooled infrared imaging arrays and systems, Academic Press, 1997
  4. T. Elbel et aI., 'Thermoelectric radiation microsensors,' Sensors and Actuators A, vol. 41-42, pp.493-496, 1994 https://doi.org/10.1016/0924-4247(94)80040-5
  5. 김명규 등, '스트레스 균형이 이루어진 $Si_3N_4/SiO_2/Si_3N4$ 유전체 멤브레인의 제작,' 센서학회지, 제4권, 제3호, pp.51-59, 1995
  6. F. Volklein, 'Thermal conductivity and diffusivity of a thin film $SiO_2-Si_3N_4$ sand-wich system.' Thin Solid Films, vol. 188, pp. 27-33, 1990 https://doi.org/10.1016/0040-6090(90)90190-O
  7. T. Elbel, 'Miniaturized thermoelectric radiation sensors,' Sensors and Materials, vol. 3, no. 2, pp.97-109, 1991
  8. Volklein et al., 'High-sensitivity radiation thermopiles made of Bi-Sb-Te films,' Sensors and Actuators A, vol. 29, pp.87-91, 1991 https://doi.org/10.1016/0924-4247(91)87109-G
  9. W. Lang et aI., 'A thin-film bolometer for radiation thermometry at ambient temperature,' Sensors and Actuators A, vol. 21-23, pp.473-477, 1990 https://doi.org/10.1016/0924-4247(89)80018-4
  10. Walter Lang et aI., 'Absorbing layers for thermal infrared detectors,' Digest of Technical Papers of Transducers '91, pp. 635-638, 1991 https://doi.org/10.1109/SENSOR.1991.148959
  11. J. Schieferdecker et aI., 'Infrared thermopile sensors with high sensitivity and very low temperature coefficient,' Sensors and Actuators A, vol. 46-47, pp. 422-427, 1995 https://doi.org/10.1016/0924-4247(94)00934-A
  12. A. W. Van Herwaarden and P. M. Sarro, 'Thermal sensors based on the Seebeck effect,' Sensors and Actuators, vol. 10, pp. 321-346, 1986 https://doi.org/10.1016/0250-6874(86)80053-1
  13. Marc C. Foote et aI., 'Uncooled thermopile infrared detector linear arrays with detectivity greater than $10^9cm{\cdot}Hz^{1/2}/W$,' IEEE Trans. on Electron Devices, vol. 45, no. 9, pp. 1896-1901, 1998 https://doi.org/10.1109/16.711353