Transactions on Electrical and Electronic Materials
- 제1권2호
- /
- Pages.12-17
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- 2000
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- 1229-7607(pISSN)
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- 2092-7592(eISSN)
Characterization of Helicon Plasma by H$_2$ Gas Discharge and Fabrication of Diamond Tinn Films
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Hyun, June-Won
(School of Natural Science, Dankook University) ;
- Kim, Yong-Jin (School of Natural Science, Dankook University) ;
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Noh, Seung-Jeong
(School of Natural Science, Dankook University)
- 발행 : 2000.06.01
초록
Helicon waves were excited by a Nagoya type III antenna in magnetized plasma, and hydrogen and methane are fed through a Mass Flow Controller(MFC). We made a diagnosis of properties of helicon plasma by H