The Korean Journal of Ceramics

한국세라믹학회 (The Korean Ceramic Society)
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Orientation Control of $SrBi_2Ta_2O_9$ Thin Films on Pt (111) Substrates

  • 발행 : 2000.06.01
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초록

The a-axis and c-axis prefer oriented SBT thin films could be deposited on Pt(111)/Ti/$SiO_2$$650^{\circ}C$). The c-axis preferred orientation of SBT film can be obtained by Sr deficiency and high compressive stress. However, the a-axis-oriented grains can be formed under stoichiometric Sr content and nearly stress-free state.

키워드

참고문헌

  1. Nature v.374 Fatigue Free Ferroelectric Capacitors with Platium Electrodes C.A-Paz de Araujo;J.D.Cuchiaro;L.D.McMillan;M.C.Scott;J.F.Scott
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  4. Appl.Phys.Lett. v.69 Oriented Growth of SrBi₂Ta₂O Ferroelectric Thin Films S.B.Desu;D.P.Vijay;X.Zhang;B.He
  5. ibid v.72 Control of Epitaxial Growth for SrBi₂Ta₂O Thin Films J.H.Cho;S.H.Bang;J.Y.Son;Q.W.Jia
  6. ibid v.73 Texture Control and Interfacial Structures of Thin Films on Pt J.S.Lee;H.H.Kim;H.J.Kwon;Y.W.Jeong
  7. Jpn.J.Appl.Phys. v.35 Chemical Processing and Dielectric Properties of Ferroeletric SrBi₂Ta₂O Thin Films T.Hayashi;H.Takahashi;T.Hara
  8. ibid v.36 Preparation and Dielectric Properties of SrBi₂Ta₂O Thin Films by Sol-Gel Method T.Hayashi;T.Hara;H.Takahashi
  9. Appl.Phys.Lett. v.71 Characterization of SrBi₂Ta₂O Ferroelectric Thin Films Deposited at Low Temperatures by Plasma-Enhanced Metalorganic Chemical Vapor Deposition N.J.Seong;S.G.Yoon;S.S.Lee
  10. ibid v.72 Oxide Interfacial Phases and the Electical Properties of SrBi₂Ta₂O Thin Films Prepared by Plasma-Enhanced Metalor ganic Chemical Vapor Deposition N.J.Seong;C.H.Yang;W.C.Shin;S.G.Yoon
  11. ibid v.73 Spin-coated Ferroelectric SrBi₂Nb₂O Thin Films K.Watanabe;M.Tanaka;E.Sumitomo;K.Katori;H.Yagi;J.F.Scott
  12. Integrated Ferroelectrics v.15 Sr Content Dependent of Ferroelectric Properties in SrBi₂Ta₂O Thin Films T.Hase;T.Noguchi;K.Amanuma;Y.Miyasaka
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  14. J.Vac.Sci.Technology A. v.16 no.3 Microstructure-Dependent Ferroelectric Properties in SrBi₂Ta₂O Thin Films Fabricated by the Radio Frequency Magnetron Sputtering f K.J.Cho;Y.B.Park;S.H.Lee;H.J.Jung;J.K.Lee;J.W.Park
  15. Integrated Ferroelectrics v.21 Role of Abnormal Grain Growth on the Ferroelectric Properties of SrBi₂Ta₂O Thin Films Fabricated by R.F.Magnetron Sputtering C.Bae;J.K.Lee;S.H.Lee;Y.B.Park;H.J.Jung
  16. J.Vac.Sci.Technol A. v.17 no.5 Ex situ Growth of the c-axis Preferred Oriented SrBi₂TaO Thin Films on Pt/Ti/SiO₂/Si Substrates C.Bae;J.K.Lee;S.H.Lee;H.J.Jung
  17. MRS Bulletin v.18 P.A.Finn;A.S.Mack;P.R.Besser;T.N.Marieb
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  19. ibid v.35 Crystallizaion of SrBiTaO Thin Films by Chemical Liquid Deposition I.Koiwa;T.Kanehara;J.Mita;T.Iwabuchi;T.Osaka;S.Ono;M.Maeda
  20. ibid. v.34 Characteristics of Bismuth Layered SrBiTaO Thin-Film Capacitors and Comparison with Pb(Zr,Ti)O₃ T.Mihara;H.Yoshimori;H.Watanabe;C.A.P.Araujo
  21. J.Appl.Phys. v.79 no.12 Electrical Characteristics of Heteroprocessed Pb(Zr Ti )O Films H.J.Jung;T.S.Kim