The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Microstructural Investigation of $Ba_{0.7}Sr_{0.3}TiO_3$ (BST) Thin Films on Various Electrodes and Buffers

  • Published : 2000.12.01
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Abstract

$Ba_{0.7}Sr_{0.3}TiO_3$(BST) thin films were deposited simultaneously on various electrodes and buffers by the sputtering technique. When the substrate temperature was varied, the BST thin film on each electrode showed good crystallinity above $550^{\circ}C$ as revealed by X-ray diffraction measurements. The surface morphology, determined by atomic force microscopy, indicated that the roughness of BST thin films on $RuO_2$was substrate dependent. However, BST thin films on Ru electrodes are smoother and showed no substrate dependence, probably because the precursor surface diffusion length was greater than the sinusoidal perturbations of the wavelength.

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