Phthalocyanine Organic Semiconductor for $NO_x$ Gas Sensor

  • Jung, Suk-Bong (Department of Chemical Engineering, KyungPook National Univ.) ;
  • Kim, Jae-Chang (Department of Chemical Engineering, KyungPook National Univ.) ;
  • Jeon, Hee-Kwon (Department of Chemical Engineering, KyungPook National Univ.) ;
  • Lee, Duk-Dong (Department of Electronic Engineering, KyungPook National Univ.) ;
  • Lee, Jong-Gi (Department of Chemistry, KyunPook National Univ.) ;
  • Choi, Dong-Han (Department of Semiconductor Engineering, Chong-Ju Univ.)
  • Published : 2000.09.01

Abstract

The electrical properties of various metal phthalocyanine(MPc) thin film sensors were tested in the presence of $NO_x$ gas. Among the Phthalocyanine(Pc) thin films, lead phthalocyanine(PbPc) thin film showed the best results nd its sensitivity was over 80% at 5ppm of $NO_x$ gas. Optimal operating conditions including response time and cyclic treatment of $NO_x$ were tested and discussed.

Keywords

References

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