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전기의세계
Volume 49 Issue 12
/
Pages.16-21
/
2000
/
1598-4613(pISSN)
The Korean Institute of Electrical Engineers (대한전기학회)
광응용 MEMS 기술의 동향
부종욱
(LG전자 기술원 소자재료 연구소 마이크로시스템 팀장)
Published : 2000.12.01
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