The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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Integrated Micro-Mechanical Switches for RF Applications

  • Park, Jae Y. (Microsystem Team and RF Team) ;
  • Kim, Geun H. (Microsystem Team and RF Team) ;
  • Chung, Ki W . (Microsystem Team and RF Team) ;
  • Jong U. Bu (Microsystem Team and RF Team)
  • Published : 2000.09.01
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Abstract

다양한 구조위 트랜스미션 라인과 힌지들을 갖는 고주파용 마이크로머신드 용량성 스위치들이 새롭게 디자인되었고 전기도금 기술, 저온 공정기술, 그리고 건식 식각기술들을 이용하여 제작되었다. 특히, 집적화된 용량성 스위치들이 높은 스위칭 on/off ratio와 on 캐패시턴스를 갖도록 하기 위하여 고유전율을 갖는 SrTiO3라는 상유전체를 절연체로 사용하였다. 제작된 스위치들은 8V의 구동전압, 0.08dB의 삽입손실, 42dB의 높은 isolation, 600의 on/off ratio, 그리고 50pF의 on 캐패시턴스의 특성들을 갖는다.

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References

  1. Digest of Technical Papers, Transducers 95 v.2 A Surface micromachined miniature switch for telecommunication applications with single frequences form DC up to 4GHz J. J Yao;M. F. Chang
  2. Proceedings of the 1995 IEEE MTT-S International Microwave Symposium v.1 Micromechnaical membrane switches for microwave applications C. Goldsmith;T. H. Lin;B. Powers;W. R. Wu;B. Norvell
  3. Journal of vacuum Science and Technology v.B14 no.6 Fabrication of Micromechnaical switches for routing radio frequency signals J. N. Randall;C. Goldsmith;D. Denniston;T. H. Lin
  4. IEEE Journal of Microelectromechnaical Systems v.8 no.2 Micromachined low-loss microwave switches Z. J. Yao;S. Chen;S. Eshelman;D. Denniston;C. Goldsmith
  5. Proceedings of the 1996 IEEE MTT-S International Microwave Symposium Characteristics of Micromachined Switches at Microwave Frequencies C. Goldsmith;J. Randall;S. Eshelman;T. H. Lin;S. Chen;B. Norvell
  6. Proceedings of the 1994 IEEE Micro Electro Mechanical Systems Technical Digest Self-consistent Simulation and Modeling of Electrostatically Deformed Diaphragms P. Osterberg;H. Yie;X. Cai;J. White;S. Senturia
  7. Proceedings of the 1999 IEEE Micro Electro Mechanical Systems Technical Digest A Micromechnical Switches as The Logic Elements For Circuits in Multichip Module on Si(MCM-Si) A. Hirata;K. Machida;H. Kyuragi;M. Maeda