참고문헌
- Ferroelectric Ceramics Ferroelectric Ceramics : Tailoring Properties for Specific Applications L. E. Cross;N. Setter(ed.);E. L. Colla(ed.)
- Science v.246 Ferroelectric Memories J. F. Scott;C. A. Araujo
- Ferroelectrics v.116 Ferroelectric Memories : A Comparison with Other High-speed Digital Devices J. F. Scott;L. D. McMillan;C. A. Araujo
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control v.38 no.6 Electrical and Reliability Properties of PZT Thin Films for ULSI DRAM Applications J. Carrano;C. Sudhama;V. Chikarmane;J. Lee;A. Tasch;W. Shepherd;N. Abt
- Integrated Ferroelectrics v.4 Trends in the Development of ULSI DRAM Capacitors P. C. Fazan
- Integrated Ferroelectrics v.5 High-permittivity Lead based Perovskite Dielectrics for DRAM Applications R. E. Jones, Jr.;P. D. Maniar;A. C. Campbell;R. Moazzami;C. J. Mogab
- J. Vac. Sci. Tech. A v.10 no.4 Integration of Ferroelectric Thin Films into Nonvolatile Memories S. Sinharoy;H. Buhay;D. R. Lampe;M. H. Francombe
- J. Vac. Sci. Tech. A v.10 no.1 Ferroelectric Lead Zirconate Titanate Thin Films by Radio Frequency Magnetron Sputtering E. S. Ramakrishnan;W. Y. Howng
- J. Korean Phys. Soc. v.27 Control of Pb(Zr,Ti)O₃ Thin Film Characteristics Using Metalorganic Chemical Vapor Deposition M. Shimizu;T. Shiosaki
- Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials Controlling Crystalline Orientations of So-Gel PZTs for FRAM and DRAM Applications K. Aoki;Y. Fukuda;K. Numata;A. Nishimura
- J. Vac. Sci. Tech. A v.10 no.4 Growth of Ferroelectric Oxide Thin Films by Excimer Laser Ablation S. B. Krupanidhi;N. Maffei;D. Roy;C. J. Peng
- J. Appl. Phys. v.49 no.8 Electrical Properties of Lead-Zirconate-Lead-Titanate Ferroelectric Thin Films and Their Composition Analysis by Auger Electron Spectroscopy A. Okada
-
J. Mater. Res.
v.9
no.7
Formation Kinetics of
$PbZr_xTi_{1-x}O_3$ Thin Films C. K. Kwok;S. B. Desu - J. Appl. Phys. v.71 no.2 Crystallization of Sputtered Lead Zirconate Titanate Films by Rapid Thermal Processing C. V. R. Vasant Kumar;R. Pascual;M. Sayer
- 요업학회지 v.36 no.12 결정립계가 PZT 박막의 유전 특성에 미치는 영향 이장식;박응철;박정호;이병일;주승기
- 대한금속ㆍ재료학회지 v.38 no.1 PZT seed에 의한 거대 단결정립 PZT 박막 형성에 관한 연구 이장식;박응철;박정호;이병일;주승기
- Appl. Phys. Lett. v.51 no.4 Phosphorous Doping for Hydrogenated Amorphous Silicon Films by a Low-Energy Ion Doping Technique A. Yoshida;K. Setsune;T. Hirao
- Mat. Res. Soc. Symp. Proc. v.361 The Pyrochlore-to-Perovskite Transformation in Solution-Derived Lead Zirconate Titanate Thin Films J. A. Voigt;B. A. Tuttle;T. J. Headley;D. L. Lamppa
- Elements of X-ray Diffraction, 2nd Ed. B. D. Cullity
-
J. Appl. Phys.
v.81
no.5
Single-Crystal
$Pb(Zr_xTi_{1-x})O_3$ Thin Films Prepared by Metal-Organic Chemical Vapor Deposition: Systematic compositional variation of electronic and Optical Properties C. M. Foster;G.-R. Bai;R. Csencsits;J. Vetrone;R. Jammy;L. A. Wills;E. Carr;J. Amano - Ferroelectrics v.225 Effect of Grain Size on Degradation of Pt/PLZT/Pt Capacitor K. Ogata;K. Suenaga;K. Horikoshi;K. Yoshizumi;H. Kato;M. Mori