대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

압전세라믹 기판과 고자왜박막을 결합한 스마트액츄에이타

Smart Actuators Composed of Piezoelectric Ceramics and Highly Magnetostrictive films

  • 신광호 (삼성종합기술원 MEMS Lab. 연구원) ;
  • ;
  • 발행 : 2000.05.01
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초록

This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

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참고문헌

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