The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Development of High Resolution Laser Doppler Vibrometer

고 분해능 레이저 도플러 진동계의 개발

  • 김성훈 (중앙대 공대 전기공학과) ;
  • 고진환 (중앙대 공대 전기공학과) ;
  • 김호성 (중앙대 공대 전기공학과)
  • Published : 2000.02.01
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Abstract

A high resolution Laser Doppler Vibrometer(LDV) developed using electronic fringe counting method. The fringe pattern signal obtained via analog signal processing is divided into two. One was converted to a TTL signal with a ZCD(zero-crossing detector) and then counted to calculate the displacement due to the vibration. The other was directed to the A/D converter to get a high resolution of about $\lambda/320$ with the phase comparison method. The data obtained with the A/D converter was used in the displacement calculation and the result was displayed on a LCD pane. In this study, a Laser Doppler Vibrometer with measurement range of $0.32\mum~129\mum$ and displacement resolution of 2nm, about $\lambda/320$ , was developed. And this LDV can be used to measure the dynamic of microsize devices such as MEMS(Micro Electro-Mechanical Systems) and to diagnose high capacity electric equipment such as circuit breakers and transformers, of which resonant frequencies are changed when they are damaged.

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