전기화학회지 (Journal of the Korean Electrochemical Society)
- 제3권3호
- /
- Pages.178-181
- /
- 2000
- /
- 1229-1935(pISSN)
- /
- 2288-9000(eISSN)
DOI QR Code
산소량에 따른 $SnO_x$ 박막의 음극 특성
Anode Characteristics of $SnO_x$ Films with Various Oxygen Contents
- Moon Hee-Soo (Division of Materials Science and Engineering, Hanyang University) ;
- Seong Sang-Hyun (Division of Materials Science and Engineering, Hanyang University) ;
- Kim Young-Il (Division of Materials Science and Engineering, Hanyang University) ;
-
Park Jong-Wan
(Division of Materials Science and Engineering, Hanyang University)
- 발행 : 2000.08.01
초록
본 실험에서는 리튬 이차 박막전지의 음극물질로 주석 산화물 박막을 RF magnetron sputter을 이용하여 증착하였다. RF power와 공정 압력을 각각
In this experiments, tin oxide thin film anode for microbattery was deposited by using RF magnetron sputtering. The RF power and operating pressure during deposition were fixed at