나선홈을 갖는 반구형 공기 베어링의 반경 방향 성능 측정

Radial Performances of Spiral-Grooved Spherical Air Bearings

  • 박근형 (고려대학교 대학원 기계공학과) ;
  • 최정환 (고려대학교 대학원 기계공학과) ;
  • 최우천 (고려대학교 기계공학과) ;
  • 김권희 (고려대학교 기계공학과) ;
  • 우기명 (삼성전자 기술총괄 기반기술센터) ;
  • 김승곤 (삼성전자 기술총괄 기반기술센터)
  • 발행 : 1999.02.01

초록

This paper investigates the radial performance of self-acting spiral-grooved air bearing, used to support small high-speed rotating bodies. Repeatable runout, nonrepeatable runout, stiffness and supporting load are selected as the performance. The clearance between rotor and stator, the stator groove depth, and the rotating speed are chosen as three main parameters affecting the performances. Force application and displacement measurement are done in a noncontact manner, in order not to disturb operation: electromagnetic force is applied to the rotor and gap sensors are used to measure the displacement of the rotor. Experimental results show that repeatable runout decreases as speed, groove depth and clearance decrease. Nonrepeatable runout decreases as clearance decreases, and it has a minimum value at $5.5{\mu}m$ of grove depth and a maximum value at speed of 18.000rpm. Stiffness increases as speed increases and clearance decreases, and has a maximum value around $5.5{\mu}m$ of groove depth. The relationship between force and displacement is linear for small displacement, but becomes nonlinear for large displacement. Supporting load is linearly proportional to the stiffness, and it is a maximum value around $4.75{\mu}m$ of clearance.

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