한국진공학회지 (Journal of the Korean Vacuum Society)
- 제8권4A호
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- Pages.465-469
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- 1999
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- 1225-8822(pISSN)
유리-유리 정전접합을 이용한 FED스페이서 기술 개발
Development of spacer technology using glass to glass anodic bonding for FED
초록
In this paper, spacer process for FED (Field Emission Display ) was developed with the glass to glass anodic bonding technology using Al film as an interlayer. Characteristics, current density-time curves and force of the anodic boding were measured on various thickness of Al film; 1000
키워드