Journal of Korean Vacuum Science & Technology
- 제3권2호
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- Pages.121-125
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- 1999
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- 1226-6167(pISSN)
Vertically aligned carbon nanotubes grown on various substrates by plasma enhanced chemical vapor deposition
- Han, Jae-hee (Department of Materials engineering, sungkyunkwan University) ;
- Moon, Byung-Sik (Department of Physics Sungkyunkwan University) ;
- Yang, Won-Suk (Department of Materials engineering, sungkyunkwan University) ;
- Yoo, Ji-Beom (Department of Materials engineering, sungkyunkwan University) ;
- Park, Chong-Yun (Department of Physics Sungkyunkwan University) ;
- Han, In-Taek (Material and Devices sector, Samsung Advanced Institute of Technology) ;
- Lee, Nae-Sung (Material and Devices sector, Samsung Advanced Institute of Technolog) ;
- Kim, Chong-Min (Material and Devices sector, Samsung Advanced Institute of Technology) ;
- Kim, Tae-Il (Material and Devices sector, Samsung Advanced Institute of Technology)
- 발행 : 1999.10.01
초록
Vertically well aligned multiwall carbon nanotubes were grown on nickel coated different substrates by plasma enhanced hot filament chemical vapor deposition at low temperatures below 650
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